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Australian National Fabrication Facility

Queensland Node

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    • Computer-aided design (CAD)
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Welcome to the Australian National Fabrication Facility’s Queensland Node. ANFF-Q is a world-class micro and nanofabrication facility providing access to cutting-edge equipment with support from expert staff specialising in microfluidics, organic electronics, biomaterials, novel semiconductor materials and characterisation.

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Technical Seminar: Chemical Vapour Deposition

Dielectric layers such as silicon oxide (SiOx) and silicon nitride (SiNx) play an important role in the semiconductor industry. Chemical vapour deposition (CVD) is a popular technology for depositing dielectrics, particularly plasma-enhanced CVD (PECVD). PECVD is economically viable with high deposition rate (tens of nm min−1) and is very attractive for compound semiconductors as it is possible to obtain … Read more "Technical Seminar: Chemical Vapour Deposition"

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